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Taiwan Semiconductor (TSMC)
0.13 Micron
CL013G Process
CL013G MPW Prices
1. CL013G Process (Logic) Description
This process is the TSMC nominal 0.13 Cu 1P8M FSG-IMD 1.2/2.5 V
non-RDL process.
This process has 1 poly layer, 8 metals: M1 through M7 thin, and M8
thick, with MD transfer metal under CB passivation. The process is for
1.2 volt applications. A thick oxide layer can be used for 2.5 volt
transistors. Designs for this process require M8 in the pad stack.
Flip chip bumping and SRAM support are available. However, for these
applications, please describe your requirements and request more
information from
support@mosis.com, as these
options could involve multiple changes to the standard metals stack.
For applications requiring MiM capacitor, high-resistance poly
resistor or ultra-thick topmetal (UTM8), please see the
CR013G Mixed-Mode
process description page.
The standard logic process (CL013G) offering includes 1.2/2.5 V
nominal (standard) NFET+PFET, 1.2/2.5 V Low-Vt NFET+PFET, 1.2 V
High-Vt NFET+PFET, 1.2/2.5 V Native-Vt NFET, salicide block, varactor
and BJT devices, deep N-well, and thick gate oxide (for 2.5 V
devices). This logic process (CL013G) uses epitaxial or non-epitaxial
wafers at MOSIS' discretion.
2.
TSMC Design Rules, Process Specifications, and SPICE
Parameters
TSMC has sub-licensed MOSIS to distribute this information to approved
customers who have an account with MOSIS and submit the online
TSMC Access
Request form.
Review the following
CMP and antenna guidelines which apply to this process.
Design rules supported by this technology
Only the TSMC design rules will be supported for this technology.
MOSIS Technology Codes
See
Technology
Codes for TSMC CL013G Process.
3. Parametric Test Results and SPICE Model Parameters
Contact support@mosis.com.
4. Reticle/Wafer Size, Steps, Turnaround Time, Die and Wafer Thickness
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TSMC CL013G Process
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Wafer Size
(inches)
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Reticle Size (millimeters, approx.)
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Reticle Copies Stepped on Wafer (approx.)
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Turn- around Time (weeks, approx.)
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Die Thickness
(+/- .5 mil)
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Wafer Thickness
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Mils
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Micro- meters
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Mils
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Micro- meters
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8
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21 x 21 *
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55
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11 - 12
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10
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250
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30
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760
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* Smaller sizes are available.
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Related Links
MOSIS-Supported TSMC Processes
TSMC Technology
Codes & Layer Maps
TSMC Document Access
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