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MOSIS Supported Options
IBM 10SF CMOS Process

Unless stated otherwise, all options listed below are available on MPW runs without additional cost. Other configurations are available for dedicated runs, or on MPW runs by prior arrangement. Please contact MOSIS support for additional details, e.g. costs.


Feature Group Option Descriptions Additional Masks Part Number
Base Features for CMOS 10SF Always included   42K0610

Well N-well and p-well in substrate and an isolated p-well BF, N3 93P2028

ACLV Gate Orientation Horizontal   42K4493

Oxide Thin oxide only   75H3168

Thin + medium + thick oxide EG, DG 93P2057

Fet Low-Vt + zero-Vt + regular-Vt + high-Vt + regular I/O + high-speed I/O NFET DG, EG, XW, NV, NR, IN, JN, GN, DE 32N9767

Low-Vt + regular-Vt + high-Vt + regular I/O + high-speed I/O PFET DG, EG, LW, PV, PR, IP, JP, GP, DF 32N9840

Capacitor Thin-oxide NCAP PV 27R3163

Medium-oxide NCAP EG, IP 32N9935

Thick-oxide NCAP DG, JP 32N9936

Thin-oxide PCAP NV, N3 42K4899

Resistor P+ polysilicon OP resistor OP, ZJ 45X5057

N+ diffusion OP resistor OP 41K9348

N-well resistor   17R4145

Precision p+ polysilicon RP resistor RP 27R6143

TaN resistor K1 44K5809

VN Capacitor VNCAP (BEOL capacitor)   27R6144

Bipolar Vertical PNP bipolar transistor NV 42K4201

Inductor option Native, thick wire inductor   70P6164

SRAM Standard SRAM   44K5850

Fuse Electrically programmable fuse (eFUSE)   57P6150

Wiring Three 2x low-k and two 4x wiring with LB WO, B1, W1, B2, W2, B3, YT, EA, YA, EB, VV, LB 42K4298

Metalization 10LB (4_30_02_00) M1, V1, M2, V2, M3, V3, M4, W0, B1, W1, B2, W2, B3, YT, EA, YA, EB 57P5833

Final Protection Wirebond only DV 29L5231

C4 only LV 01L6998 2

Bonding Aluminum wire bond [to LB] 01L6995

C4 plated (flip-chip) TM 01L6993 2

1 Part number available after T2 qualification. Features marked limited have some restrictions on use. The base feature part number represents standard processing for that technology. To ensure the correct manufacturing of each part, a list of features must be supplied to manufacturing. This table is intended to assist designers in providing the necessary information to MOSIS. Feature availability and limitations are shown here for reference only and might change. Features must be evaluated based on current information as part of the ordering process.

2 Contact support@mosis.com for pricing and further information.

MOSIS Supported Metal Stack
10LB_4_30_02_00


LB
  r-arrow Bond metal
VV
 
   

EB  
   
YA
 
  r-arrow 4x thick metals (in TEOS/FTEOS)

EA  
   
YT
 
   

B3
   
W2
 
   

B2
  r-arrow 2x thick metals (in low-k)
W1
 
   

B1
   
W0
 
   

M4
   
V3
 



M3
   
V2
 
  r-arrow 1x thin metals

M2
   
V1
 
   

M1
   
CA
 
   



Related Links
  • IBM 10SF Process
  • IBM Technology Codes
  • MOSIS-Supported IBM Processes





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